11410 飛秒雷射微加工導論

Course keywords

飛秒雷射 Femtosecond laser, 微製造 Microfabrication, 雷射物質交互作用 Laser-matter interaction, 材料改性 Material modification, 微細加工 Micromachining, 積層製造 Additive manufacturing, 微系統應用 Microsystem application

Course Description

Femtosecond laser is a type of laser that emits light in a pulsed format with durations shorter than one picosecond. This property enables it to deliver ultrahigh optical power to a micro- or even nanoscale region in a material, while keeping thermal effects minimized. Consequently, efficient nonlinear absorption of photons can occur in the exposed region of the material, causing extremely localized and unique material modifications. Such modifications, including ablation, densification, molecule crosslinking, and formation of self-organized patterns, have found promising applications in microfabrication for manufacturing useful structures and devices that are otherwise challenging to realize. Consequently, femtosecond laser has become a highly relevant tool for various application fields such as electronics, integrated photonics, micro-optics, MEMS, microfluidics, and life science.

This course aims to provide students with (1) basic knowledge of the fundamentals of femtosecond lasers and the interactions between femtosecond laser pulses and different materials, (2) a comprehensive understanding of femtosecond laser microfabrication techniques, and (3) an overview of established and potential applications of those techniques in different fields of research and industry. Upon completing this course, students are expected to (1) have a clear idea of the unique and various capabilities of a femtosecond laser as a tool for microfabrication, (2) be capable of identifying opportunities that femtosecond laser microfabrication can be applied to solving engineering challenges or facilitating scientific investigations in their own research field, and (3) be able to suggest a project to evaluate and develop such opportunities with the consideration of experiment design, material/device characterization, limitations, and alternative techniques.

Text Books and References

1. 1. Steen, William M. & Mazumder, Jyotirmoy., Laser Material Processing, 4th ed.
      2010. ed. (London: Springer London, 2010).
   2. Osellame, Roberto, Cerullo, Giulio & Ramponi, Roberta, Femtosecond Laser
      Micromachining: Photonic and Microfluidic Devices in Transparent Materials, 1.
      Aufl. ed. (Berlin, Heidelberg: Springer Nature, 2012).
   3. Baldacchini, Tommaso, Three-dimensional microfabrication using two-photon
      polymerization, Second edition. ed. (Oxford, England ; William Andrew, 2020).
   4. Selected journal publications

Teaching Method

Lecture, in-class discussion, course project

Syllabus

1. 1. Introduction to microfabrication
   2. Basic principles of continuous-wave lasers and pulsed lasers
   3. Laser-material interactions
   4. Precise micromachining of opaque materials
      • Underlying mechanism
      • Ablation
      • Applications
   5. Additive manufacturing
      • Multiphoton lithography
      • Patterning strategy
      • Material design
      • Laser-induced forward transfer
      • Applications
   6. Controlled modification of transparent materials
      • Femtosecond laser-assisted etching
      • Refractive index changing
      • Formation of self-organized structures
      • Applications
   7. Summary & outlook

Evaluation

Class attendance & involvement: 15%, Assignments: 40%, Final report: 30%, Final presentation: 15%

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